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2026年3月31日
Turbo Molecular Pumps
Turbo Molecular Pumps bearing parts repairment. supplier
Repair Pump Brand below
Introduction to Turbo Molecular Pumps
In 1956, German engineer W. Becker invented the turbo molecular pump, which uses rapidly spinning rotors and stationary stators to create a vacuum. These pumps are specially for high-vacuum applications.
Leading Manufacturers
Manufacturers produce turbo molecular pumps, below:
BOC Edwards/Leybold/Alcatel/Varian (now part of Agilent) |
Pfeiffer/Osaka/Shimadzu/Ebara |
Turbo molecular pumps can be categorized into three types:
- Magnetic Bearing Turbo Pumps
- Mechanical Bearing Turbo Pumps
- Hybrid Magnetic Bearing Turbo Pumps
Advantages of Turbo Molecular Pumps
Oil-Free Operation: They produce clean high vacuum without oil vapor contamination. |
Fast Start-Up: Turbo pumps activate quickly, making them efficient for various applications. |
Compact Design: They occupy less space and can be installed in limited areas (except oil-lubricated types). |
High Gas Throughput: They are well-suited for processes with high gas loads, such as sputtering and etching. |
Versatile Pressure Range: Capable of operating between 10^-1 to 10^-3 Torr, where ion pumps and other low-temperature systems may struggle. |
Disadvantages of Turbo Molecular Pumps
High Cost: These pumps generally come with a steep price tag. |
Sensitivity to Particulates: They can be affected by dust or debris, impacting performance. |
Fragile Design: Some models may not withstand atmospheric shocks, risking damage from resonance or blade collisions. |
Shenzhen Sefuto tech co ltd, we have team professional in a molecular pump maintenance, providing outstanding service bearings parts for turbo molecular pump needs. For inquiries or support, feel free to reach out to us!
C36HY26 | Upper bearing of TG70F |
C38HY33 | MDP5011, TG220/350/450 |
C105HY14 | F-400 Turbomolecular Pump |
SCB1662 | Turbomolecular Pump TPH2200/2201SP |
VAC607AB045 | Turbomolecular Pump TurboVac 450i |
VAC626AC003 | Turbomolecular Pump TwisTorr 304FS Down Bearing of TwisTorr 304FS,Exchange SCB1559 |
VAC6000AC004 | TwisTorr 304FS Turbomolecular Pump Upper Bearing of TwisTorr 304FS,Exchange C100SSTAY36 |
C1912X205Y11 | Magnetic Turbomolecular Pump MAG W2000/W2200 |
C103HX205Y15DF | Magnetic Turbomolecular Pump MAG 5000/W830C |
C105SSY30 | Dry Pump A100 |
VAC16008AH023 | Magnetic Turbomolecular Pump ATH/1000/1300/1600 |
C30X103HX205Y33DF | Magnetic Turbomolecular Pump ATH/1000/1300/1600/2300 |
C2204HX205Y13DF | Magnetic Turbomolecular Pump STP-A2203/ 2300 , TMP-V3304LM Edwards STP-A2203LVS/ STP-A3003CV |
VAC625AC001 | Turbomolecular Pump TwisTorr 84FS Down Bearings of TwisTorr 84FS,Exchange SCB1569 |
VAC625AC002 | Turbomolecular Pump TwisTorr 84FS Upper Bearings of TwisTorr 84FS,Exchange SCB1569Y1 |
VAC7206AA014 | Dry Pump EPX180L/EPX500NE Down bearings for Dry Pump EPX180L/EPX500NE |
VAC7205AA013 | Dry Pump EPX180L/500NE/IPX100A/180A/500A Upper bearings for Dry Pump |
VAC624AA002 | Turbomolecular Pump EXT75DX Turbomolecular Pump Edwards EXT75DX |
VAC608AA020 | Turbomolecular Pump nEXT300D, nEXT400DHQ |
VAC623AD017 | Turbomolecular Pump HIPACE10 HIPACE10, Exchange into C2M3TGTY21 |
VAC623AD018 | HIPACE10, Exchange into C2M3TGTY22 |
VAC6213AB050 | Vacuum Dry Pump DV650/DV450； Exchange into C213VY8 (#6511696) |
VAC608AA021 | Turbomolecular Pump Next200/200, nEXT240D； |
VAC6211AB049 | Vacuum Dry Pump DV650/DV450 Exchange into C211VY7 (#6511486) |
C1908X205Y15 | Magnetic Turbomolecular Pump MAG W1300iP/W1600iP/W2200iP |
C101SSTAY31 | Turbomolecular Pump ATH300 |
VAC624AA019 | Turbomolecular Pump EXT70, TMH060/062/063/064 |
VAC624AD288 4*13*6mm | Turbomolecular Pump HIPACE80/SplitFlow80 12 oil holes on the outer ring C36SSTAY52 VJ-244 GJ-293 |
VAC61900AC016 | C1900STAY11 VJ-244 GJ-293 |
C1900STAY19 | |
VAC608AC286 | Turbomolecular Pump TwisTorr704FS Down Bearings of TwisTorr704FS |
CS18M6X205Y1 DRY (6*13*3.5mm) | Pfeiffer TMH071P,HIPACE80,TMH261/260 TMH520, HIPACE400/700, upper touch down bearing |
C34-5SSTY64 | Turbomolecular Pump TURBOVAC TW70 |
C37SSTY27CM4 | Turbomolecular Pump TW300/290/SL300 |
C36SSTAY52 | |
C104HY17 | F-400 |
VAC607AD012 | Turbomolecular Pump HIPACE300 12 oil holes on the outer ring |
C36TGTY77 | TMH260/261/262 |
C200HY19RC11 | TMP1000C/1100C Turbomolecular Pump Repairing |
C1900STAY11 10x22x6mm | Turbomolecular Pump V250/V301 Upper Bearings of V250, V301 C1900STAY7 или C1900STAY11 и C36SSTAY39 C36SSTAY39 orginally，repair exchange：C36SSTAY52 |
C1900STAY7 10x22x6mm | 10x22x6mm |
C36SSTAY39 | 18x10x8mm |
C36SSTAY51 | Turbomolecular Pump V70/ V81 Upper Bearings of V70/V81 |
103HCDUL | Turbomolecular Pump Bearings 215HDM0-9 |
VCMP114 | Dry Pump IXH6050/4050/IXL500Q bearings Exchange into SCB1313Y1 |
C2M4TGTY59 | Turbomolecular Pump TMH071P |
VCMP212 | Edwards Dry Pump IXL500Q/GXS450/750/920 Exchange into SCB1313Y6 |
VCMP209ASP | Dry Pump IXH1210/1820/3030T/GXS160/250 VCMP209ASP, Exchange into C209SY10 |
C206SY7 | Dry Pump GX600/IXH645BP/IGX100N Exchange into SCB1216 |
C211HY7 | Dry Pump IH1800/IH600 Exchange into SCB1000Y13 |
C38SSTY58 | Turbomolecular Pump TURBOVAC361/TW250 TMP361 ,TW250 |
C101SSTY33 | Turbomolecular Pump T1600 |
C2M4TGTY60 | Turbomolecular Pump HIPACE80/SplitFlow80 |
C101SSTAY32 | Turbomolecular Pump V551/V801/902 Upper Bearings of V551 |
C202SSTX1 | Turbomolecular Pump 3KG |
C102TGTY23 | Turbomolecular Pump TMH1000/1201/HIPACE1200/1500 |
C30X103TGTY28 | Turbomolecular Pump TPH1600/TPH2101C/HiPace1800/2300 |
C34-5HY51RC11 | Turbomolecular Pump TURBOVAC 50 |
C30X38TGTY102 | HIPACE400/700 |
C34-5HSSY50C11 | TMP35 |
C34-5SSTY63 | TW70 Down bearing of TW70 |
SCB1643Y1 | Turbomolecular Pump TW701/TW690 |
C38SSTY95 | Turbomolecular Pump TW220/TW400 |
C38STY98K5 | Turbomolecular Pump EXT255 |
C101HSSY48DS1.85 | T1600 old version(3 pieces one pump) |
C36HX99K810C10 | Turbomolecular Pump TPH/TPU-330/TPH510 |
C102HY17 | Turbomolecular Pump TG2400 Down bearing of TG2400 |
C101HY23 | Turbomolecular Pump ATP150/400/900/PTM5400 |
C34HY4 | Turbomolecular Pump TG70F Down bearing of TG70F |
C101HY30 | Turbomolecular Pump -TG800/ TG1100/ TG2400 |
VAC6001AC287 | Turbomolecular Pump TwisTorr704FS Upper Bearings of TwisTorr704FS pump, Exchange SCB1674 |
VAC608AA021 | Turbomolecular Pump TurboVac 850i Down Bearing |
VAC608AB290 two-piece riveted synthetic | Turbomolecular Pump TurboVac 850i Down Bearing TurboVac 850i Down Bearing,Oringal bearing:C38SSTY101 |
VAC728AA291 | Turbomolecular Pump EXT556H |
VAC6004AD292 | Turbomolecular Pump HiPace2800 Instead of Original C30X104TGTY23 |
VAC7206AA294 | Dry Pump IPX100A/180A/500A Down bearings for Dry Pump IPX100A/180A/500A |
VAC61806AG271 Upper emergency touchdown bearing | Magnetic Turbomolecular Pump MAG W300iP/600iP/Hipace700M MAG W300iP/600iP/Hipace700M, Exchange into C1806X205Y3 Down Bearing : VAC71901AB293 |
VAC71901AB293 Angular Contact Ball Bearing, DF in pair | Magnetic Turbomolecular Pump MAG W300iP/600iP/Hipace700M Exchange into C1901HX205Y6DF |
VAC628AC295 | Turbomolecular Pump TwisTorr 305FS Upper Bearings of TwisTorr 305FS,Exchange SCB1670 |
VAC626AC296 | Turbomolecular Pump TwisTorr 305FS Exchange SCB1559Y2 |
C100SSTAY35 | Turbomolecular Pump TwisTorr 305FS Turbomolecular Pump V903 UPPER BEARING Agilent V903 UPPER BEARING |
VAC624AD288 (4*13*6) | pump splitflow 310 |
C100SSTY41 | Molecular Pump Bearing V903 |
C211HY1 | |
C36SSTAY52 | |
SCB967Y4 | Magnetic Turbomolecular Pump ATH-2300/2303M |
C105HX205Y18DF | Magnetic Turbomolecular Pump MAG W2000/W2200 Edwards |
CS1902JX205Y14DB | Magnetic Turbomolecular Pump MAG900 |
CS1901JX205Y24DB | Magnetic Turbomolecular Pump MAG W300/400, MAG900 |
C1910X205Y2 | Magnetic Turbomolecular Pump MAG 5000/W830 |
C38SSTY67K5 GJ-264 HYSS608/006-2Z GRW-ZG.611178-A CP | 8x22x10.31 |
C38SSTGTY82 HYSS608-2Z P4 C10/15 GPR T4HB 20% G535 | 8x22x7 |
HYSS6900-Z | Turbomolecular Pump V250/V301 Upper Bearings of V250, V301 |
C1908X205Y15 | Magnetic Turbomolecular Pump MAG W1300iP/W1600iP/W2200iP Down Bearing : C103HX205Y15DF |
C36SSTAY52 | Down Bearings of V70/V81/V301/V250 |
C2M4TGTY59 | Turbomolecular Pump TMH071P |
C34-5HY51RC11 | Turbomolecular Pump TURBOVAC 50 TMP50 Grease (no grease in the bearing),grease filling is required before installation |
VAC7204AB044 | Turbostream D1500G |
VAC608AB047 | Turbomolecular Pump TW701/TW690 |
Others
Barden turbo molecular pump bearing
Leybold Turbovac 90i-C34-5SSTY63CM2 BARDEN
C30X103TGTY28 TPH1600/TPH2101C/HiPace1800/2300
C30X38TGTY102 HIPACE400/700
molecular pump bearing- VAC608AA021 8x22x10.31/11.71mm for Edward nEXT240/300/400 lower
Pfeiffer pump Hipace 80 -262XS 300molecular pump bearing with C2M4TGTY60(4X13X6.5mm),VAC607AD012,VAC624AD269,FINDLING HYS624B6C6F/PA
molecular pump bearing Barden 304HDL 20x52x15mm
FINDLING HY S607 TP H/NG Pfeiffer pump 300 molecular pump
VAC607AD012 Turbomolecular Pump HIPACE30012 oil holes on the outer ring